Implementing sequential segmented interleaving algorithm for enhanced process control

An apparatus for implementing Advanced Process Control (APC) of a fabrication tool for enhanced magnetic properties process output control comprising:

• a fabrication process tool controller implementing a sequential segmented interleaving algorithm with two tuning equations running in parallel;
• and
• said fabrication process tool controller calculating a deposition time after a production run based upon a relationship between a magnetic properties process output and a current deposition time process input;
• and said calculated deposition time based upon an output offset including an identified deposition thickness offset;
• and comparing said calculated deposition time with said current deposition time plus a maximum time adjustment and comparing said calculated deposition time with said current deposition time minus said maximum time adjustment;
• said fabrication process tool controller, responsive to said calculated deposition time being greater than said current deposition time plus said maximum time adjustment;
• setting said calculated deposition time to said deposition time plus said maximum time adjustment;
• said fabrication process tool controller, responsive o said calculated deposition time being less than said current deposition time minus said maximum time adjustment;
• setting said calculated deposition time to said current deposition time minus said maximum time adjustment;
• said fabrication process tool controller, responsive to said calculated deposition time being between said current deposition time plus said maximum time adjustment and said current deposition time minus said maximum time adjustment, setting said calculated deposition time to said calculated deposition time;
• said fabrication process tool controller calculating a deposition rate offset value after a calibration run based upon the relationship between a calibration deposition thickness process output and an updated deposition time process input calculated after a last production run, said calculated deposition rate offset value including a deposition time for said calibration run;
• said fabrication process tool controller storing said calculated deposition rate offset value;
• and
• said fabrication process tool controller applying said set calculated deposition time to the fabrication tool for a next production run.

A system for implementing Advanced Process Control (APC) of a fabrication tool for enhanced electrical, magnetic, or physical properties process output control comprising:

• a processor;
• a control code stored on a computer readable medium, said control code including a sequential segmented interleaving algorithm with two tuning equations running in parallel;
• a fabrication process tool controller implementing said sequential segmented interleaving algorithm with two tuning equations running in parallel;
• and
• said fabrication process tool controller calculating a deposition time after a production run based upon a relationship between a magnetic properties process output and a current deposition time process input;
• and said calculated deposition time based upon an output offset including an identified deposition thickness offset;
• and
• comparing said calculated deposition time with said current deposition time plus a maximum time adjustment and comparing said calculated deposition time with said current deposition time minus said maximum time adjustment;
• said fabrication process tool controller, responsive to said calculated deposition time being greater than said current deposition time plus said maximum time adjustment;
• setting said calculated deposition time to said deposition time plus said maximum time adjustment;
• said fabrication process tool controller, responsive o said calculated deposition time being less than said current deposition time minus said maximum time adjustment;
• setting said calculated deposition time to said current deposition time minus said maximum time adjustment;
• said fabrication process tool controller, responsive to said calculated deposition time being between said current deposition time plus said maximum time adjustment and said current deposition time minus said maximum time adjustment, setting said calculated deposition time to said calculated deposition time;
• said fabrication process tool controller calculating a deposition rate offset value after a calibration run based upon the relationship between a calibration deposition thickness process output and an updated deposition time process input calculated after a last production run, said calculated deposition rate offset value including a deposition time for said calibration run;
• said fabrication process tool controller storing said calculated deposition rate offset value;
• and
• said fabrication process tool controller applying said set calculated deposition time to the fabrication tool for a next production run.