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US 8,402,918 B2Granted
Showerhead electrode with centering feature
AssigneeLam Research Corporation
InventorsBabak Kadkhodayan, Anthony de la Llera
Life of this patent
Estimating the term…
Abstract
A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
Claims14
A showerhead electrode for use as an upper electrode of a capacitively coupled plasma processing chamber, comprising:
- a circular plate having a plasma exposed surface on a lower face thereof, a mounting surface on an upper face thereof;
- the mounting surface including an annular channel configured to receive a centering ring and a plurality of alignment pin recesses configured to receive alignment pins arranged in a pattern matching alignment pin holes in a backing plate;
- the circular plate including process gas outlets arranged in a pattern matching gas supply holes in the backing plate, the gas outlets communicating with gas passages extending between the upper and lower faces.
A centering ring operable to frictionally hold a backing plate to a showerhead electrode, the centering ring being of a polymer material with a height of about 0.3 inch, inner diameter of about 0.24 inch and outer diameter of about 0.44 inch.
Dependencies are inferred from the claim text.