Back to results
US 8,399,809 B1Granted
Load chamber with heater for a disk sputtering system
AssigneeWD Media, LLC
InventorAllen J. Bourez
Life of this patent
Estimating the term…
Abstract
A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.
Claims18
A disk processing system, comprising:
- a plurality of processing chambers;
- a load chamber comprising a heater, wherein the load chamber has a side wall, wherein the heater is disposed adjacent to the side wall inside of the load chamber, and wherein the heater comprises a heating element having a thickness being less than 1 inch and capable of being electrically coupled to a power supply to provide a power great than 1.1 K Watts to heat a disk within the load chamber;
- and
- a disk transport system coupled to the plurality of processing chambers and the load chamber to transport the disk there among.
1 more element
Dependencies are inferred from the claim text.