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US 8,394,243 B1Granted
Sputtered cobalt oxide for perpendicular magnetic recording medium with low media noise
AssigneeWD Media, LLC
InventorsHong-Sik Jung, Donald Stafford, B. Ramamurthy Acharya, Sudhir S. Malhotra, Gerardo A. Bertero
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Abstract
Method of incorporating atomic oxygen into a magnetic recording layer by sputtering a target containing an oxide of cobalt. The oxide of cobalt may be sputtered to provide a readily dissociable source of oxygen which may increase the concentration of free cobalt atoms (Co) in the magnetic recording layer and also increase oxide content in the magnetic recording layer.
Claims21
A method of forming a magnetic recording media, the method comprising:
- providing a substrate;
- and
- sputtering a target alloy including at least cobalt(Co), chromium (Cr), platinum(Pt), cobalt (II) oxide (CoO), and one or more non-cobalt oxides to form a magnetic recording layer over the substrate.
A deposition system for depositing a magnetic recording layer over a magnetic recording media, comprising:
- a first target comprising an alloy including cobalt (CO), chromium (Cr), platinum (Pt), cobalt (II) oxide (CoO), and one or more non-cobalt oxides;
- and
- a pallet to position a first recording media substrate surface proximate to the first target, wherein the first substrate includes a magnetic layer.
Dependencies are inferred from the claim text.