X-ray inspecting apparatus and X-ray inspecting method

An X-ray inspecting apparatus, forming images of X-ray transmitted through an area of inspection of an object on a plurality of detection surfaces, for executing a process of reconstructing an image of the area of inspection, comprising:

• a plurality of X-ray detectors smaller in number than the detection surfaces, configured to pick-up images on said plurality of detection surfaces;
• a translational driving unit configured to move said plurality of X-ray detectors in a translational manner in a prescribed plane;
• an X-ray output unit configured to output X-ray such that the X-ray transmitted through said area of inspection enters said plurality of X-ray detectors moved to a plurality of image pick-up positions as said detection surfaces, said X-ray output unit is further configured to generate, to a plurality of X-ray detectors simultaneously in a state of image pick-up among the plurality of X-ray detectors arranged at said image pick-up positions, X-rays from a plurality of corresponding X-ray focal point positions;
• a shielding member configured to allow passage of X-rays from said X-ray output unit, from a corresponding X-ray focal point position through said area of inspection to each of said detection surfaces of each of said X-ray detectors simultaneously in a state of image pick-up, and block an X-ray from a not-corresponding X-ray focal point position;
• and
• a control unit configured to control an operation of said X-ray inspecting apparatus;
• wherein
• said control unit includes:
• an image acquisition control unit configured to control timing of exposure by each of said X-ray detectors and said translational driving unit,
• an X-ray output control unit configured to control said X-ray output unit, and
• an image reconstruction processing unit configured to reconstruct image data of said area of inspection, based on data of intensity distribution of the X-ray transmitted through said area of inspection, picked-up at said plurality of detection surfaces.

A method to be performed by an X-ray inspecting apparatus for X-ray inspection, picking-up images of X-rays transmitted through an area of inspection of an object by X-ray detectors corresponding to a plurality of detection surfaces, for executing a process of reconstructing an image of said area of inspection, wherein said X-ray inspecting apparatus includes an X-ray output unit and a control unit, said control unit is configured to control an operation of said X-ray inspecting apparatus, the method comprising the steps of:

• moving each of said X-ray detectors independently to an image pick-up position to be said detection surface;
• outputting, by said X-ray output unit, an X-ray such that the X-ray transmitted through said area of inspection enters said plurality of X-ray detectors moved to a plurality of said image pick-up positions respectively;
• controlling, by said control unit, timing of exposure;
• executing, in parallel, by said control unit, a process of image pick-up by said some of said plurality of X-ray detectors at a first position among said plurality of image pick-up positions, and a process of moving remaining ones, different from said some, of said plurality of X-ray detectors, to a second position different from said first position among said plurality of image pick-up positions;
• and
• reconstructing, by said control unit, image data of said area of inspection, based on data of intensity distribution of X-ray transmitted through said area of inspection, picked-up at said plurality of detection surfaces.