Multiple-wavelength opto-electronic device including a superlattice
AssigneeMears Technologies, Inc.
InventorsRobert J. Mears, Robert John Stephenson, Marek Hytha, Ilija Dukovski, Jean Augustin Chan Sow Fook Yiptong, Samed Halilov, Xiangyang Huang
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Abstract
A multiple-wavelength opto-electronic device may include a substrate and a plurality of active optical devices carried by the substrate and operating at different respective wavelengths. Each optical device may include a superlattice comprising a plurality of stacked groups of layers, and each group of layers may include a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon.
Claims34
An opto-electronic device comprising:
- a substrate;
- and
- a plurality of active optical detectors carried by said substrate and having respective different spectral absorption responses;
- at least one active optical detector from among the plurality thereof comprising a superlattice comprising a plurality of stacked groups of layers, and each group of layers comprising a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon.
An opto-electronic device comprising:
- a substrate;
- and
- a plurality of active optical detectors carried by said substrate and having respective different spectral absorption responses, said plurality of active optical detectors being arranged in a vertically stacked arrangement;
- at least one active optical detector from among the plurality thereof comprising a superlattice comprising a plurality of stacked groups of layers, and each group of layers comprising a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon;
- at least one other one of said plurality of active optical detectors comprising a non-superlattice semiconductor junction.
A method for making an opto-electronic device comprising:
- forming a plurality of active optical detectors carried by a substrate and having respective different spectral absorption responses;
- at least one active optical detector from among the plurality thereof comprising a superlattice comprising a plurality of stacked groups of layers, and each group of layers comprising a plurality of stacked semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer thereon.
Dependencies are inferred from the claim text.