Back to results
US 8,387,482 B2Granted
Method and system to control movement of a body for nano-scale manufacturing
AssigneeMolecular Imprints, Inc.
InventorsByung-Jin Choi, Sidlgata V. Sreenivasan
Life of this patent
Estimating the term…
Abstract
Systems to control movement of a template during an imprint lithography process are described. The systems include an orientation stage having an inner frame, and outer frame, and a plurality of actuators coupled between the inner frame and the outer frame to vary translational motion and impart angular motion about a plurality of axes.
Claims7
A system to control movement of a template for use in imprint lithography, comprising:
- an orientation stage, coupled to the template, the orientation stage comprising:
- an inner frame having a central throughway surrounded by a surface;
- an outer frame having a central opening in superimposition with the central throughway;
- a template chuck configured to support the template;
- a flexure ring coupled to the inner frame and the outer frame and positioned outside of the central throughway and the central opening;
- and,
- a plurality of actuators coupled between the outer frame and the inner frame and configured to tilt the inner frame with respect to the outer frame by facilitating translational motion of the inner frame along a plurality of translation axes (Z1, Z2, Z3).
4 more elements
A system to control movement of a template for use in imprint lithography, comprising:
- an orientation stage, coupled to the template, the orientation stage comprising:
- an inner frame;
- an outer frame;
- a flexure ring coupled to the inner frame and the outer frame;
- and,
- a plurality of actuators coupled between the inner frame and the outer frame configured to vary translational motion along two or more translation axes (Z1, Z2, Z3) located proximate to a periphery of the inner frame and imparting angular motion about one of a plurality of tilt axes (T1, T2, T3).
3 more elements
Dependencies are inferred from the claim text.