Fine pattern mold
AssigneeHitachi Industrial Equipment Systems Co., Ltd.
InventorsMasahiko Ogino, Mitsuru Hasegawa, Kenya Ohashi, Akihiro Miyauchi, Hitoshi Suzuki, Toshio Haba, Haruo Akahoshi
Life of this patent
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Abstract
The fine pattern mold that includes a roll, a buffer tube with inner peripheral surface is in contact with an outer peripheral surface of the roll, and a stamper tube in which its inner peripheral surface is in contact with an outer peripheral surface of the buffer tube and a fine concave/convex pattern is formed on its outer peripheral surface, wherein the buffer tube has a larger coefficient of linear expansion and a smaller elastic modulus than those of the stamper tube.
Claims3
A method for producing a fine pattern mold, comprising the steps of:
- forming a stamper tube having a fine concave/convex pattern on its outer peripheral surface;
- forming a buffer tube, on a peripheral surface of a roll, having a larger coefficient of linear expansion and a smaller elastic modulus than those of said stamper tube;
- fitting said stamper tube onto said buffer tube while cooling said buffer tube;
- forming a stamper sheet on a master plate having said concave/convex pattern on its surface and replicating said concave/convex pattern on two or more said stamper sheets;
- joining two or more said stamper sheets in a peripheral direction such that said surface on which said concave/convex pattern is formed will become an outer peripheral surface;
- and
- wherein the joining of the two or more said stamper sheets is achieved by and electrolytic plating process.
Dependencies are inferred from the claim text.