Method and system for providing a magnetic recording transducer having a planarized near-field transducer and a sloped pole
AssigneeWestern Digital (Fremont), LLC
InventorsYufeng Hu, Ut Tran
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Abstract
A method and system for fabricating an energy assisted magnetic recording (EAMR) transducer is described. The EAMR transducer has an air-bearing surface (ABS) and a waveguide. The method includes providing a planarized near field transducer (NFT) for the waveguide and forming a sloped surface on the planarized NFT. The sloped surface has a front edge separated from the ABS by a distance. The method and system also include providing a write pole on the sloped surface.
Claims13
A method for providing energy assisted magnetic recording (EAMR) transducer having an air-bearing surface (ABS) and a waveguide, the method comprising:
- providing a planarized near field transducer (NFT) for the waveguide, the planarized NFT having at least one side and a top surface substantially coplanar with a portion of the EAMR transducer adjoining the at least one side of the planarized NFT upon completion of the planarized NFT;
- forming a sloped surface on the planarized NFT, the sloped surface having a front edge separated from the ABS by a distance;
- and
- providing a write pole on the sloped surface.
A method for providing heat assisted magnetic recording (EAMR) transducer including a waveguide and having an air-bearing surface (ABS) comprising:
- providing a planarized near field transducer (NFT) having at least one side and a top surface substantially coplanar with a portion of the EAMR transducer adjoining at least one side of the planarized NFT upon completion of the planarized NFT, the step of providing the planarized NFT further including:
- depositing a substantially flat metallic layer;
- providing an isolated line mask on the metallic layer, the isolated line mask including an isolated line corresponding to a line-portion of the planarized NFT proximate to the ABS;
- removing an exposed portion of the metallic layer to provide the line-portion of the planarized NFT proximate to the ABS;
- providing an insulator adjoining the line-portion of the planarized NFT and having an insulator top substantially coplanar with the top of the line-potion of the planarized NFT, the insulator forming a first portion of the cladding of the waveguide;
- providing a pad portion mask having a pad aperture covering at least a portion of the line-portion of the planarized NFT;
- removing an exposed portion of the line-portion of the planarized NFT;
- providing an additional metallic layer;
- performing a lift off of the pad portion mask;
- forming a second portion of the cladding having a sloped surface on the planarized NFT using an undercut mask having an aperture therein, the aperture having an undercut, the sloped surface having a front edge separated from the ABS by a distance;
- and
- providing a write pole on the sloped surface, the step of providing the write pole further including
- depositing a stop layer, a portion of the stop layer residing on the sloped surface;
- providing an insulating layer on the stop layer;
- and
- removing a portion of the insulating layer, a remaining portion the insulating layer having a trench corresponding to the pole formed therein and forming a third portion of the cladding,
- providing at least one pole layer;
- planarizing the at least one pole layer.
Dependencies are inferred from the claim text.