Charged particle beam drawing apparatus and article manufacturing method using same

A method of manufacturing an article, the method comprising:

• performing drawing on a substrate using a drawing apparatus that includes a blanking deflector array and performs drawing on a substrate with a plurality of charged particle beams passed through the blanking deflector array, wherein the drawing apparatus comprises:
• a detector having a size for which the detector can simultaneously detect two adjacent charged particle beams among the plurality of charged particle beams, and configured to detect an intensity of a charged particle beam incident thereon;
• and a controller, wherein the controller is configured to perform a control of a position of the detector and a control of the blanking deflector array such that one of two adjacent charged particle beams is in a blanking state and the other is in a non-blanking state on the detector that is moved, and each of the plurality of charged particle beams becomes in a blanking state and a non-blanking state sequentially, to cause the detector to perform an output in parallel with the control, and to inspect a defect in each blanking deflector in the blanking deflector array based on the output;
• developing the substrate on which the drawing has been performed;
• and
• processing the developed substrate to manufacture the article.