Fabrication method of microfluidic circuit, and microfluidic circuit fabricated by method thereof
AssigneeRohm Co., Ltd.
InventorShun Momose
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AssigneeRohm Co., Ltd.
InventorShun Momose
Estimating the term…
A fabrication method of a microfluidic circuit is provided, dispensable of mask registration, absent of deviation in mask positioning, and inexpensive in fabrication cost. The fabrication method of a microfluidic circuit has a light transmissive substrate stacked on a light absorptive substrate, and the light transmissive substrate welded with the light absorptive substrate for bonding by directing light through the light transmissive substrate. The microfluidic circuit includes a microchannel at the bottom face of the light transmissive substrate and/or at the top face of the light absorptive substrate. The method includes the step of forming, at the light transmissive substrate, a light attenuation region attenuating transmittance of light towards the microchannel when light is directed through the light transmissive substrate.
A fabrication method of a microfluidic circuit having a light transmissive substrate that is composed of thermoplastic resin and that is stacked on a light absorptive substrate, said microfluidic circuit including a microchannel at a bottom face of said light transmissive substrate and/or at a top face of said light absorptive substrate, said method comprising:
Dependencies are inferred from the claim text.