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US 8,376,685 B2Granted
Dual scara arm
AssigneeBrooks Automation, Inc.
InventorsAntonio F. Pietrantonio, Anthony Chesna, Hakan Elmoli, Ulysses Gilchrist
Life of this patent
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Abstract
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
Claims26
A substrate transport apparatus comprising:
- a drive section;
- and
- a scara arm operably connected to the drive section to move the scara arm, the scara arm comprising:
- an upper arm and at least two forearms movably mounted on the upper arm and capable of holding a substrate thereon,
- wherein the upper arm includes a first arm section and a second arm section that are releasably coupled to each other at a common axis of rotation to form a substantially rigid link where the first and second arm sections are incapable of movement relative to one another during substrate transport, each of the arm sections having at least one of the at least two forearms movably mounted thereon and wherein the releasable coupling adjustably joins the arm sections to each other at the common axis of rotation for changing a predetermined dimension of the upper arm.
2 more elements
A substrate transport apparatus comprising:
- a drive section;
- and
- a scara arm operably connected to the drive section to move the scara arm, the scara arm comprising:
- an upper arm and at least one forearm movably mounted on each of the substantially opposite sides of the upper arm and capable of holding a substrate thereon,
- wherein the upper arm is a substantially rigid link having first and second arm sections that are adjustably joined at a common axis of rotation for changing a predetermined dimension of the upper arm, where the first and second arm sections form respective ones of the substantially opposite sides of the upper arm,
- wherein a coupling interface of the first arm section and a coupling interface of the second arm section include indexing positions thereon and allow the first arm section and second arm section to be positionally indexed relative to each other, the coupling interfaces define the adjustable coupling at least in part, and wherein the indexing positions are defined by being mechanically engaged fasteners.
3 more elements
A substrate transport apparatus comprising:
- a drive section;
- and
- a scara arm operably connected to the drive section to move the scara arm, the scara arm comprising:
- an upper arm and at least two forearms movably mounted on the upper arm and capable of holding a substrate thereon,
- wherein the upper arm includes a first substantially rigid arm section and a second substantially rigid arm section that are incapable of movement relative to one another during substrate transport, each of the first substantially rigid arm section and the second substantially rigid arm section having at least one of the at least two forearms movably mounted thereon, and a releasable coupling releasably attaching the first and second substantially rigid arm sections to each other at a common axis of rotation, wherein, when released, the first arm section is movable about the common axis of rotation relative to the second arm section for changing a predetermined dimension of the upper arm.
2 more elements
Dependencies are inferred from the claim text.