Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope

A method, comprising:

• controlling a microelectromechanical gyroscope provided with a microstructure that includes a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a sensing axis, in response to rotations of the microstructure, the controlling including:
• discrete-time sensing a discrete-time position of the driving mass with respect to the driving axis, the discrete-time sensing including producing a discrete-time detection signal that indicates the discrete-time position of the driving mass;
• converting the discrete-time detection signal to a continuous-time detection signal;
• and
• controlling an oscillation amplitude of the driving mass based on the continuous-time detection signal.

A system comprising:

• a control unit;
• and
• a microelectromechanical gyroscope coupled to the control unit and configured to be controlled by the control unit, the gyroscope including:
• a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure;
• and
• a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
• wherein the sensing device comprises:
• a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass;
• and
• a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass.

A sensing device for a microstructure that includes a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a sensing axis in response to rotations of the microstructure, the sensing device comprising:

• a discrete-time sensing interface configured to sense a discrete-time position of the driving mass with respect to the driving axis and produce a discrete-time detection signal that indicates the discrete-time position of the driving mass;
• a converter configured to convert the discrete-time detection signal to a continuous-time detection signal;
• and
• a driving amplifier coupled to the converter and configured to control an oscillation amplitude of the driving mass based on the continuous-time detection signal.