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US 8,373,137 B2Granted
High resolution energy-selecting electron beam apparatus
AssigneeNion Co.
InventorsOndrej L. Krivanek, Niklas Dellby
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AssigneeNion Co.
InventorsOndrej L. Krivanek, Niklas Dellby
Estimating the term…
A high resolution energy-selecting electron beam apparatus and method for improving the energy resolution of electron-optical systems by restricting the energy range of admitted electrons, and optionally also for improving the spatial resolution by correcting chromatic and geometric aberrations. The apparatus comprises a plurality of magnetic or electrostatic prisms that disperse an electron beam according to the energies of the electrons into an energy spectrum, a plurality of magnifying lenses such as electromagnetic or electrostatic quadrupoles that increase the energy dispersion of the energy spectrum, an energy-selecting slit that selects a desirable range of energies of the electrons, and optionally also sextupole, octupole and higher-order lenses that correct chromatic and geometric aberration of the electron-optical system. The apparatus also comprises further magnetic or electrostatic prisms and electron lenses arranged such that the energy dispersion of the electron beam emerging from the apparatus is cancelled.
An energy-selecting apparatus for decreasing an energy range of an electron beam incident on a sample, said apparatus comprising:
An electron beam apparatus comprising:
A method of selecting a pass-band of electron energies that renders an electron beam narrower in its energy spread in an electron beam apparatus such as an electron microscope, said method comprising the steps of:
Dependencies are inferred from the claim text.