Plasma-resistant ceramics with controlled electrical resistivity
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Kenneth S. Collins, Ren-Guan Duan, Senh Thach, Thomas Graves, Xiaoming He, Jie Yuan
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Abstract
Specialty ceramic materials which resist corrosion/erosion under semiconductor processing conditions which employ a corrosive/erosive plasma. The corrosive plasma may be a halogen-containing plasma. The specialty ceramic materials have been modified to provide a controlled electrical resistivity which suppresses plasma arcing potential.
Claims8
A ceramic-comprising article having a surface comprising at least one solid solution, wherein said article is useful in semiconductor plasma processing chambers which require both corrosive plasma erosion resistance and an electrical resistivity which reduces the possibility of arcing, wherein said solid solution is formed from precursor oxides where yttrium oxide is present at a concentration ranging from about 55 molar % to about 80 molar %, zirconium oxide is present at a concentration ranging from about 5 molar % to about 25 molar %, and wherein hafnium oxide, niobium oxide, or a combination thereof is present at a concentration ranging from about 5 molar % to about 25 molar %.
Dependencies are inferred from the claim text.