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US 8,367,035 B2Granted
Methods of making spatially aligned nanotubes and nanotube arrays
AssigneeThe Board of Trustees of the University of Illinois
InventorsJohn A. Rogers, Coskun Kocabas, Moonsub Shim, Seong Jun Kang, Jang-Ung Park
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Abstract
The present invention provides arrays of longitudinally aligned carbon nanotubes having specified positions, nanotube densities and orientations, and corresponding methods of making nanotube arrays using guided growth and guided deposition methods. Also provided are electronic devices and device arrays comprising one or more arrays of longitudinally aligned carbon nanotubes including multilayer nanotube array structures and devices.
Claims31
A method for making an array of longitudinally aligned carbon nanotubes;
- said method comprising the steps of:
- providing a guided growth substrate having a receiving surface, wherein said guided growth substrate is a single crystalline Y-cut or rotated Y-cut quartz substrate having a cut angle selected from the range of 0 degrees to 42.75 degrees;
- wherein said guided growth substrate is characterized by a principle guided growth axis in the plane of said receiving surface;
- patterning said receiving surface with a carbon nanotube growth catalyst to generate bands of catalyst separated from each other by regions of said receiving surface having substantially no catalyst present, wherein said bands of catalyst are oriented to intersect the principle guided growth axis and have a surface concentration of catalyst selected from the range of 1000 particles μm−2 to 10 particles μm−2;
- and wherein said regions of said receiving surface having substantially no catalyst present have a surface concentration of catalyst less than or equal to 1 particle μm−2;
- and
- growing longitudinally aligned carbon nanotubes on said receiving surface of said guided growth substrate via guided growth, wherein said nanotubes grow between the bands of catalyst along nanotube growth axes parallel to the principle guided growth axis of said guided growth substrate, thereby making said array of longitudinally aligned carbon nanotubes.
4 more elements
Dependencies are inferred from the claim text.