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US 8,363,379 B2Granted
Altering capacitance of MIM capacitor having reactive layer therein
AssigneeInternational Business Machines Corporation
InventorsDaniel C. Edelstein, Anthony K. Stamper
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Abstract
Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.
Claims20
A method comprising:
- forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer,
- wherein the reactive layer includes a tunable dielectric constant material;
- and
- altering the reactive layer to change a capacitive value of the MIM capacitor, wherein the altering includes creating a dipole moment change in the reactive layer to change a dielectric constant of the tunable dielectric constant material.
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A method comprising:
- forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer,
- wherein the reactive layer includes a reactive conductor;
- and
- altering the reactive layer to change a capacitive value of the MIM capacitor, wherein the altering includes stressing to cause at least one of reacting or diffusing of the reactive conductor with the insulator layer to change one of the dielectric constant or spacing between the first and second electrode.
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A method comprising:
- forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer,
- wherein the reactive layer includes a portion of the first or the second electrode that is in contact with the insulator layer;
- and
- altering the reactive layer to change a capacitive value of the MIM capacitor.
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Dependencies are inferred from the claim text.