US 8,357,286 B1Granted

Versatile workpiece refining

AssigneeSemCon Tech, LLC

InventorCharles J. Molnar

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Abstract

Versatile methods of refining a first and a second layer of a workpiece are discussed. New refining methods and refining apparatus are disclosed. The new refining methods can help improve yield and appreciably change the cost of manufacture for refining of workpieces. The methods can be applied to workpieces having extremely close tolerances such as semiconductor wafers. New methods of control are also discussed. Methods use controllers, processors, computers, and processor readable memory devices are discussed. Use of stored information is to make changes in process control are discussed. Use of process models are discussed for refining. Determining a changed process control with stored information from first and second layers of a workpiece is disclosed. A changed process control can make an appreciable changes to the cost of manufacture of a workpiece.

Claims25

Dependent claims

A method of refining a first and a second layer of a workpiece, each having an effect on a cost of manufacture of the workpiece, the method comprising:

applying a first refining energy to the first layer of the workpiece for a first layer refining;
sensing an in situ process information for the first layer of the workpiece with an at least one operative sensor for the first layer refining;
determining a change for an at least one first layer control parameter “A” using an at least one tracked information related to the workpiece and the in situ process information for the first layer of the workpiece with an at least one processor for the first layer refining;
controlling the at least one first layer process control parameter “A” to change a first workpiece surface with an at least one operative controller for the first layer refining;
storing for future availability a stored information related to the at least one first layer process control parameter “A”, the at least one tracked information related to the workpiece, and the in situ process information for the first layer of the workpiece;
applying a second refining energy to the second layer of the workpiece having an at least one second layer control parameter “B” for a second layer refining;
sensing an in situ process information for the second layer of the workpiece with an at least one operative sensor for the second layer refining;
determining a change for the at least one second layer control parameter “B” using the at least one tracked information related to the workpiece, the in situ process information for the first layer of the workpiece, and the in situ process information for the second layer of the workpiece with an at least one processor for the second layer refining;
controlling the at least one second layer process control parameter “B” to change a second workpiece surface with an at least one operative controller for the second layer refining;
and
using at least in part an at least one process model during the method and wherein the method makes an appreciable change to the cost of manufacture of the workpiece.

8 more elements

A method of refining a first and a second layer of a workpiece, each having an effect on a cost of manufacture of the workpiece, the method comprising:

applying a first refining energy to the first layer of the workpiece for a first layer refining;
sensing an in situ process information for the first layer of the workpiece with an at least one operative sensor for the first layer refining;
determining a change for an at least one first layer control parameter “A” using an at least one tracked information related to the workpiece, an at least one tracked quality information related to the first layer refining, and the in situ process information for the first layer of the workpiece with an at least one processor for the first layer refining;
controlling the at least one first layer process control parameter “A” to change a first workpiece surface during the first layer refining of the first layer of the workpiece with an at least one operative controller for the first layer refining;
storing for future availability a stored information related to the at least one first layer process control parameter “A”, the at least one tracked information related to the workpiece, the at least one tracked quality information related to the first layer refining, and the in situ process information for the first layer of the workpiece;
applying a second refining energy to the second layer of the workpiece having an at least one second layer control parameter “B” for a second layer refining;
sensing an in situ process information for the second layer of the workpiece with an at least one operative sensor for the second layer refining;
determining a change for the at least one second layer control parameter “B” using the at least one tracked information related to the workpiece, the in situ process information for the first layer of the workpiece, the at least one tracked quality information related to the first layer refining, an at least one tracked quality information related to the second layer refining, and the in situ process information for the second layer of the workpiece with an at least one processor for the second layer refining;
controlling the at least one second layer process control parameter “B” to change a second workpiece surface during the second layer refining of the second layer of the workpiece with an at least one operative controller for the second layer refining;
and
using at least in part an at least one process model during the method and wherein the method makes an appreciable change to the cost of manufacture of the workpiece.

8 more elements

A method of refining a first and a second layer of a workpiece, each having an effect on a cost of manufacture of the workpiece, the method comprising:

applying a first refining energy to the first layer of the workpiece for a first layer refining;
sensing an in situ process information for the first layer of the workpiece with an at least one operative sensor for the first layer refining;
determining a change for an at least one first layer control parameter “A” using an at least one tracked information related to the workpiece, an at least one tracked refining rate information related to the first layer refining, and the in situ process information for the first layer of the workpiece with an at least one processor for the first layer refining;
controlling the at least one first layer process control parameter “A” to change a first workpiece surface during the first layer refining of the first layer of the workpiece with an at least one operative controller for the first layer refining;
storing for future availability a stored information related to the at least one first layer process control parameter “A”, the at least one tracked information related to the workpiece, the at least one tracked refining rate information related to the first layer refining, and the in situ process information for the first layer of the workpiece;
applying a second refining energy to the second layer of the workpiece having an at least one second layer control parameter “B” for a second layer refining;
sensing an in situ process information for the second layer of the workpiece with an at least one operative sensor for the second layer refining;
determining a change for the at least one second layer control parameter “B” using the at least one tracked information related to the workpiece, the in situ process information for the first layer of the workpiece, the at least one tracked refining rate information related to the first layer refining, an at least one tracked refining rate information related to the second layer refining, and the in situ process information for the second layer of the workpiece with an at least one processor for the second layer refining;
controlling the at least one second layer process control parameter “B” to change a second workpiece surface during the second layer refining of the second layer of the workpiece with an at least one operative controller for the second layer refining;
and
using at least in part an at least one process model during the method and wherein the method makes an appreciable change to the cost of manufacture of the workpiece.

8 more elements

A method of refining a first and a second layer of a workpiece, each having an effect on a cost of manufacture of the workpiece, the method comprising:

applying a first refining process to the first layer of the workpiece for a first layer refining;
sensing an in situ process information for the first layer of the workpiece with an at least one operative sensor for the first layer refining;
determining a change for an at least one first layer control parameter “A” using an at least one tracked information related to the workpiece, an at least one tracked refining rate information related to the first layer refining, an at least one tracked quality information related to the first layer refining, and the in situ process information for the first layer of the workpiece with an at least one processor for the first layer refining;
controlling the at least one first layer process control parameter “A” to change a first workpiece surface during the first layer refining of the first layer of the workpiece with an at least one operative controller for the first layer refining;
storing for future availability a stored information related to the at least one first layer process control parameter “A”, the at least one tracked information related to the workpiece, the at least one tracked refining rate information related to the first layer refining, the at least one tracked quality information related to the first layer refining, and the in situ process information for the first layer of the workpiece;
applying a second refining process to the second layer of the workpiece having an at least one second layer control parameter “B” for a second layer refining;
sensing an in situ process information for the second layer of the workpiece with an at least one operative sensor for the second layer refining;
determining a change for the at least one second layer control parameter “B” using the at least one tracked information related to the workpiece, the in situ process information for the first layer of the workpiece, the at least one tracked refining rate information related to the first layer refining, the at least one tracked quality information related to the first layer refining, an at least one tracked refining rate information related to the second layer refining, an at least one tracked quality information related to the second layer refining, and the in situ process information for the second layer of the workpiece with an at least one processor for the second layer refining;
controlling the at least one second layer process control parameter “B” to change a second workpiece surface during the second layer refining of the second layer of the workpiece with an at least one operative controller for the second layer refining;
and
using at least in part an at least one process model during the method and wherein the method makes an appreciable change to the cost of manufacture of the workpiece.

8 more elements

Dependencies are inferred from the claim text.