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US 8,356,968 B2Granted
Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
AssigneeApplied Materials, Inc.
InventorsVinay K. Shah, Sushant S. Koshti
Life of this patent
Estimating the term…
Abstract
Methods and systems are provided. The invention includes performing a handshake directly between a load port associated with process equipment and material handling equipment; and transferring a carrier between the material handling equipment and the load port based on the handshake. Numerous other aspects are provided.
Claims14
A method for transferring a substrate carrier comprising:
- providing a load port associated with a process equipment tool;
- providing a controller associated with material handling equipment;
- providing a load port sensor adapted to detect a state of the load port and to indicate if the load port is empty, wherein said load port sensor detects an empty load port and indicates that the load port is empty independent of whether the process equipment tool is empty or contains a substrate;
- providing a communication link between the load port and the controller associated with the material handling equipment, wherein the communication link provides the material handling equipment with changes in the load port sensor state;
- performing a handshake directly between the load port and material handling equipment by transferring isolated input/output (I/O) signals, via the communication link, between the load port and material handling equipment;
- transferring a substrate carrier between the material handling equipment and the load port based on the handshake, wherein the handshake comprises an exchange of communication signals before and during the transfer of the substrate carrier;
- and
- exchanging communication signals after transfer of the substrate carrier via the handshake.
5 more elements
A method for transferring a substrate carrier comprising:
- providing a load port for loading substrates into a process tool;
- providing a controller for controlling an automated material handling system robot to place substrate carriers at the load port;
- providing a load port sensor adapted to detect a state of the load port and to indicate if the load port is empty, wherein said load port sensor detects an empty load port and indicates that the load port is empty independent of whether the process tool is empty or contains a substrate;
- providing a communication link between the load port and the automated material handling system robot, wherein the communication link provides the automated material handling system robot with changes in a load port sensor state;
- performing a handshake directly between the load port and the automated material handling system robot by transferring input/output (I/O) signals, via the communication link, directly between the load port and material handling equipment;
- and
- initiating movement of the automated material handling system robot toward a substrate carrier for transfer to the load port only after the load port has confirmed availability of the load port via the handshake, wherein the handshake includes an exchange of communication signals at least before the transfer of the substrate carrier.
4 more elements
Dependencies are inferred from the claim text.