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US 8,354,294 B2Granted
Liquid chemical deposition apparatus and process and products therefrom
OwnerL. Pierre de Rochemont, Alexander J. Kovacsinventors
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Abstract
A method, apparatus and material produced thereby in an amorphous or crystalline form having multiple elements with a uniform molecular distribution of elements at the molecular level.
Claims39
A method for forming an amorphous material, comprising the steps of:
- mixing liquid metalorganic precursors in solution;
- projecting a liquid aerosol of the metalorganic precursor solution toward a surface in a deposition chamber having a controlled gas atmosphere;
- exposing the projected aerosol to a plurality of internal process areas within the deposition chamber, prior to contact of the projected aerosol with the surface to phase separate and evaporate liquid solvents from the aerosolized metalorganic precursors;
- heating the surface to a temperature higher than decomposition temperatures of the metalorganic precursors;
- and
- decomposing the metalorganic precursors upon contact with the heated surface to form the amorphous material.
3 more elements
An apparatus for forming an amorphous material comprising:
- a deposition chamber;
- a spraying device located for projecting a liquid aerosol of metalorganic precursors toward a surface located in the deposition chamber;
- a plurality of radiant energy or thermal sources located on a side of the deposition chamber to create a plurality of internal process areas to phase separate and evaporate liquid solvents from aerosolized metalorganic precursors prior to contact with the surface;
- and
- a heater adapted to heat the surface to a temperature higher than the decomposition temperature of the metalorganic precursors,
- wherein the heater is effective to cause decomposition of the metalorganic precursors upon contact with the surface when heated to form the amorphous material.
3 more elements
A material comprising four or more elements in a crystalline material of macroscopic dimensions and having an elemental composition which varies ≦±1.5 mol % at the atomic scale.
Dependencies are inferred from the claim text.