Substrate processing apparatus and display method for substrate processing apparatus

A substrate processing apparatus comprising:

• a carrying system configured to carry substrates;
• a substrate holding tool included in the carrying system and configured to receive the substrates;
• a manipulation unit configured to display a carrying state of the substrate holding tool on a manipulation screen;
• and
• a control unit configured to control a carrying operation of the carrying system,
• wherein, when the substrate holding tool starts to be lifted/lowered, the control unit transmits a lifting/lowering start message containing information about a transportation origin and a transportation destination of the substrate holding tool to the manipulation unit;
• when a lifting/lowering of the substrate holding tool stops, the control unit transmits a lifting/lowering end message containing lifting/lowering end information of the substrate holding tool to the manipulation unit;
• when the manipulation unit receives the lifting/lowering start message, the manipulation unit displays a direction icon on the manipulation screen to indicate a direction from the transportation origin to the transportation destination of the substrate holding tool;
• while the substrate holding tool is being lifted/lowered, the manipulation unit moves a carrying system icon indicating the substrate holding tool based on actual positional information in a state where the direction icon is being displayed;
• and
• when the manipulation unit receives the lifting/lowering end message, the manipulation unit removes the direction icon from the manipulation screen and stops the carrying system icon indicating the substrate holding tool.

A display method performed in a substrate processing apparatus including a carrying system configured to carry a substrate, a manipulation unit configured to display an operation state of the carrying system on a manipulation screen, and a control unit configured to control a carrying operation of the carrying system, the display method comprising:

• (a) starting the carrying operation of the carrying system and transmitting a carrying start message containing information about a transportation origin and a transportation destination of the carrying system from the control unit to the manipulation unit;
• (b) displaying a carrying system icon indicating the carrying system at a predetermined position of the manipulation screen corresponding to the transportation origin of the carrying system and a carrying-in icon at a predetermined position of the manipulation screen corresponding to the transportation destination of the carrying system when the carrying start message transmitted by the control unit is received by the manipulation unit;
• (c) terminating the carrying operation of the carrying system and transmitting a carrying end message from the control unit to the manipulation unit;
• and
• (d) removing the carrying-out icon and the carrying-in icon from the manipulation screen when the carrying end message transmitted by the control unit is received.

A display method performed in a substrate processing apparatus including a carrying system configured to carry substrates, a substrate holding tool included in the carrying system and configured to receive the substrates, a manipulation unit configured to display a carrying state of the substrate holding tool on a manipulation screen, and a control unit configured to control a carrying operation of a carrying system, the display method comprising:

• (a) transmitting a lifting/lowering start message containing an information about a transportation origin and a transportation destination of the substrate holding tool from the control unit to the manipulation unit when the substrate holding tool starts to be lifted/lowered;
• (b) displaying a direction icon on the manipulation screen to indicate a direction from the transportation origin to the transportation destination of the substrate holding tool when the lifting/lowering start message is received by the manipulation unit;
• (c) moving a carrying system icon indicating the substrate holding tool based on an actual positional information thereof with the direction icon being displayed on the manipulation screen while the substrate holding tool is being lifted/lowered;
• (d) transmitting a lifting/lowering end message containing a lifting/lowering end information of the substrate holding tool from the control unit to the manipulation unit when a lifting/lowering of the substrate holding tool stops;
• and
• (e) removing the direction icon from the manipulation screen and stopping the carrying system icon indicating the substrate holding tool when the lifting/lowering end message is received by the manipulation unit.