Field electron emission source
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsLi Qian, Liang Liu, Shou-Shan Fan
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Abstract
A method for manufacturing a field electron emission source includes: providing an insulating substrate; patterning a cathode layer on at least one portion of the insulating substrate; forming a number of emitters on the cathode layer; coating a photoresist layer on the insulating substrate, the cathode layer and the emitters; exposing predetermined portions of the photoresist layer to radiation, wherein the exposed portions are corresponding to the emitters; forming a mesh structure on the photoresist layer; and removing the exposed portions of photoresist layer. The method can be easily performed and the achieved the field electron emission source has a high electron emission efficiency.
Claims11
A field electron emission source comprising:
- an insulating substrate;
- a cathode layer deposited on the insulating substrate;
- a plurality of emitters formed on the cathode layer;
- at least one spacer arranged on the insulating substrate, and a distance between the cathode layer and the at least one spacer is more than 20 microns;
- a plurality of protrusions formed on inner sidewalls of the at least one spacer;
- and
- a grid spaced apart from the insulating substrate by the at least one spacer, a plurality of through holes defined in the grid corresponding to positions of the emitters, wherein opposite edges of the at least one spacer respectively contact the insulating substrate and the grid.
Dependencies are inferred from the claim text.