Method for laser machining transparent materials
AssigneeUniversitat Zu Lubeck
InventorsAlfred Vogel, Norbert Linz, Sebastian Freidank
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Abstract
A method for machining a transparent material by the non-linear absorption of pulsed laser radiation, in the region of a laser focus, includes the following steps: a laser wavelength of between 300 and 1000 μm is selected; and laser impulses having a temporally flat beam profile are applied. The method is characterized in that the irradiation intensity is selected from an interval pre-determined for the material to be machined, in which plasma is formed without plasma luminescence. An apparatus for laser treating a transparent material includes structure to set an irradiance and inspect the treatment as being within a defined interval.
Claims11
Method for treating a transparent material by non-linear absorption of pulsed laser radiation taking place in the area of a laser focus, having the following steps
- Selecting a laser wavelength from an interval from 300 ps to 1000 nm,
- Selecting a pulse length from an interval from 300 ps to 20 ns,
- Applying laser pulses with a temporal smooth beam profile, characterised in that
- an irradiance is selected from an interval predetermined for the material to be treated, in which plasma formation occurs without plasma luminescence.
Apparatus comprising:
- a laser for treating a transparent material by non-linear absorption of pulsed laser radiation taking place in an area of a laser focus, having a wavelength in a range from 300 to 1000 nm and a pulse length in a range from 300 ps to 20 ns,
- means for setting an irradiance, the laser producing laser pulses with a temporally smooth beam profile, and
- inspection means that register a treatment success of the laser and act on the means for setting the irradiance in such a way that the irradiance is within an interval between a detection limit of the inspection and an occurrence of plasma luminescence in the material treated.
Dependencies are inferred from the claim text.