Resist composition, method of forming resist pattern, novel compound, and acid generator

A compound represented by general formula (b1-11) shown below:

• wherein each of R7″ to R9″ independently represents an aryl group or an alkyl group, and two of R7″ to R9″ may be bonded to each other to form a ring with the sulfur atom, with the provision that at least one of R7″ to R9″ represents a substituted aryl group having a group represented by general formula (I) shown below as a substituent;
• and X− represents an anion;
• and
• wherein R5 represents an organic group selected from the group consisting of an aromatic hydrocarbon group having 3 to 30 carbon atoms and a carbonyl group, an ester bond or a sulfonyl group;
• a linear or branched saturated hydrocarbon group having 3 to 15 carbon atoms and;
• a carbonyl group, an ester bond or sulfonyl group;
• a cyclic saturated hydrocarbon group having 3 to 20 carbon atoms and a carbonyl group, an ester bond or a sulfonyl group;
• and a linear or branched unsaturated aliphatic hydrocarbon group having 2 to 5 carbon atoms and a carbonyl group, an ester bond or a sulfonyl group;
• and Q represents a linear or branched alkylene group or a hetero atom-containing linking group.

A compound represented by general formula (b1-11) shown below:

• wherein each of R7″ to R9″ independently represents an aryl group or an alkyl group, and two of R7″ to R9″ may be bonded to each other to form a ring with the sulfur atom, with the provision that at least one of R7″ to R9″ represents a substituted aryl group having a group represented by general formula (I) shown below as a substituent;
• and X− represents an anion;
• and
• wherein R5 represents an organic group having a sulfonyl group;
• a linear or branched aliphatic hydrocarbon group having 3 to 15 carbon atoms and an ester bond or a carbonyl group;
• an aromatic hydrocarbon group having 3 to 30 carbon atoms and an ester bond or a carbonyl group;
• or a saturated aliphatic cyclic group having 3 to 20 carbon atoms in which hydrogen atoms bonded to a carbon atom of the cyclic group have been replaced by an oxygen atom;
• and Q represents a divalent linking group.