Fluid controller
AssigneeFujikin Incorporated
InventorMutsunori Koyomogi
Life of this patent
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Abstract
There is provided a fluid controller having an enhanced vibration preventing characteristic without affecting pressure controlling operations. A valve element 4 is moved with respect to a valve seat 3 due to a change of balance between a fluid pressure acting on a diaphragm 10 and an elastic force of a pressure-setting spring 13, thereby controlling a pressure of a fluid. A vibration prevention member 17 is placed in a disk-shaped movable member 12 which moves integrally with the diaphragm 10. The vibration prevention member 17 includes a casing which incorporates therein a weight member interposed between elastic members.
Claims14
A fluid controller comprising
- a diaphragm which partitions an inside of the fluid controller into a valve chamber and a control chamber,
- a valve seat and a valve element which are provided in the valve chamber, and
- a pressure-setting spring provided in the control chamber, the fluid controller being adapted to move the valve element with respect to the valve seat for controlling a pressure of a fluid through a change of balance between a fluid pressure acting on the diaphragm and an elastic force of the pressure-setting spring,
- wherein one or more vibration prevention members are placed in a movable member which moves integrally with the diaphragm, and a center portion of the movable member is formed to be a portion for receiving the pressure-setting spring, and the vibration prevention member is secured to an outer peripheral edge portion of the movable member, and the vibration prevention members include a casing which incorporates therein a weight member interposed between elastic members, exerting an elastic force in the same directions as the pressure-setting spring.
Dependencies are inferred from the claim text.