MEMS resonator array structure and method of operating and using same

A MEMS array structure comprising:

• a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
• and
• at least one resonator coupling section including a first resonator coupling section disposed between the first bulk mode resonator and the second bulk mode resonator to mechanically couple the first bulk mode resonator and the second bulk mode resonator;
• wherein:
• each of the first and second bulk mode resonators includes at least one respective nodal point;
• the first resonator coupling section is disposed between the at least one nodal point of the first bulk mode resonator and the at least one nodal point of the second bulk mode resonator;
• at least one of the first and second bulk mode resonators is mechanically coupled to a substrate via or approximately at its respective at least one nodal point;
• and
• the plurality of bulk mode resonators have a first state of oscillation in which the first bulk mode resonator is contracted, at least in part, in at least one of a first direction and a second direction, and expanded, at least in part, in at least one of a third direction and a fourth direction, and in which the second bulk mode resonator is expanded, at least in part, in at least one of the first direction and the second direction, and contracted, at least in part, in at least one of the third direction and the fourth direction, wherein the second direction is opposite the first direction, and the fourth direction is opposite the third direction.

A MEMS array structure comprising:

• a plurality of resonators including a first resonator and a second resonator, wherein the plurality of resonators have a first state of oscillation in which the first resonator is contracted, at least in part, in at least one of a first direction and a second direction, and expanded, at least in part, in at least one of a third direction and a fourth direction, and in which the second resonator is expanded, at least in part, in at least one of the first direction and the second direction, and contracted, at least in part, in at least one of the third direction and the fourth direction, wherein the second direction is opposite the first direction, and the fourth direction is opposite the third direction;
• and
• at least one resonator coupling section including a first resonator coupling section disposed between the first resonator and the second resonator to mechanically couple the first resonator and the second resonator;
• wherein:
• each of the first and second resonators includes at least one respective nodal point;
• the first resonator coupling section is disposed between the at least one nodal point of the first resonator and the at least one nodal point of the second resonator;
• and
• each of at least one of the first and second resonators is mechanically coupled to a substrate via or approximately at its respective at least one nodal point.

A MEMS array structure comprising:

• a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
• a first plurality of electrodes disposed juxtaposed the first bulk mode resonator;
• and
• a second plurality of electrodes disposed juxtaposed the second bulk mode resonator;
• wherein:
• at least one electrode of the first plurality of electrodes is coupled to at least one electrode of the second plurality of electrodes;
• each of the first and second bulk mode resonators includes at least one respective nodal point;
• a first resonator coupling section is disposed between a specified one of the at least one nodal point of the first bulk mode resonator and a specified one of the at least one nodal point of the second bulk mode resonator;
• and
• each of at least one of the first and second bulk mode resonators is mechanically coupled to a substrate via or approximately at its respective specified one of the at least one nodal point.

A MEMS array structure comprising:

• a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
• a first plurality of electrodes to receive a drive signal and induce oscillation of the first bulk mode resonator;
• and
• a second plurality of electrodes to receive the drive signal and induce oscillation of the second bulk mode resonator;
• wherein:
• at least one electrode of the first plurality of electrodes is coupled to at least one electrode of the second plurality of electrodes;
• each of the first and second bulk mode resonators includes at least one respective nodal point;
• a first resonator coupling section is disposed between a specified one of the at least one nodal point of the first bulk mode resonator and a specified one of the at least one nodal point of the second bulk mode resonator;
• and
• each of at least one of the first and second bulk mode resonators is mechanically coupled to a substrate via or approximately at its respective specified one of the at least one nodal point.

A MEMS array structure comprising:

• a plurality of bulk mode resonators including a first bulk mode resonator and a second bulk mode resonator;
• a first plurality of electrodes to sense oscillation of the first bulk mode resonator;
• a second plurality of electrodes to sense oscillation of the second bulk mode resonator;
• and
• wherein:
• at least one of the first plurality of electrodes is coupled to at least one of the second plurality of electrodes;
• each of the first and second bulk mode resonators includes at least one respective nodal point;
• a first resonator coupling section is disposed between a specified one of the at least one nodal point of the first bulk mode resonator and a specified one of the at least one nodal point of the second bulk mode resonator;
• and
• each of at least one of the first and second bulk mode resonators is mechanically coupled to a substrate via or approximately at the specified one of the at least one nodal point.