Production of multilayered thin film particles
AssigneesToyota Motor Engineering & Manufacturing North America, Inc., Toyota Motor Corporation
InventorsSongtao Wu, Hongfei Jia, Debasish Banerjee, Minjuan Zhang, Masahiko Ishii
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Abstract
A process for producing particles from a thin film is provided. The process includes grinding the thin film using granules that afford for the particles to maintain a structure and/or one or more properties of the thin film. In addition, the process provides for a high recovery percentage of the source material.
Claims13
A process for producing particles from a thin film having a multilayered structure while maintaining the multilayered structure of the film and providing a high recovery rate of the particles, the process comprising:
- providing a substrate;
- producing a thin film having a multilayered structure on the substrate;
- removing the thin film intact from the substrate, the thin film having a first hardness;
- providing granules having a second hardness less than the first hardness, the granules being completely soluble in a rinsing liquid;
- grinding the intact thin film into particles using the granules, the particles retaining the multilayered structure of the thin film;
- and
- rinsing the particles and the granules in the rinsing liquid, the granules dissolving in the rinsing liquid and leaving the particles to be recovered.
Dependencies are inferred from the claim text.