Method for modeling devices in a wafer

A method for modeling devices in a wafer, comprising the steps of:

• providing the wafer comprising a first plurality of devices having a track width TW and a first stripe height SH1, a second plurality of devices having the track width TW and a second stripe height SH2, and a third plurality of devices having the track width TW and a third stripe height SH3;
• measuring resistance values for the first, second and third plurality of devices to obtain a data set correlating a stripe height and a resistance value for each of the first, second and third plurality of devices;
• and
• estimating a linear relationship between resistance and inverse stripe height for the first, second and third plurality of devices based on the data set,
• wherein SH1 differs from SH2 by a first predetermined amount δH1, and wherein SH2 differs from SH3 by a second predetermined amount δH2, such that SH1+δH1=SH2 and SH2+δH2=SH3.