System and method for extracting parasitic elements

An extracting method of parasitic elements, comprising:

• classifying each of interconnection layers of a layout structure of a semiconductor device into one of an upper interconnection layer and a lower interconnection layer based on a predetermined criterion;
• generating a marker to indicate a via-contact connection said upper interconnection layers and said lower interconnection layers;
• generating an upper layer parasitic element list by extracting parasitic elements in said upper interconnection layers based on a first criterion;
• generating a lower layer parasitic element list by extracting parasitic elements in said lower interconnection layers based on a second criterion which is different from said first criterion;
• and
• generating, using a computer, a parasitic element list of said layout by combining said upper layer parasitic element list and said lower layer parasitic element list by using said marker.

A non-transitory computer-readable tangible storage medium in which a computer-executable program code is stored to realize an extracting method of parasitic elements, wherein said extracting method comprises:

• classifying each of interconnection layers of a layout structure of a semiconductor device into one of an upper interconnection layer and a lower interconnection layer based on a predetermined criterion;
• generating a marker to indicate a via-contact connecting said upper interconnection lavers and said lower interconnection layers;
• generating an upper layer parasitic element
• list by extracting parasitic elements in said upper interconnection layers based on a first criterion;
• generating a lower layer parasitic element list by extracting parasitic elements in said lower interconnection layers based on a second criterion which is different from said first criterion;
• and
• generating a parasitic element list of said layout by combining said upper layer parasitic element list and said lower layer parasitic element list by using said marker.