Charged particle beam writing apparatus, write data creation method and charged particle beam writing method

A write data creation method, comprising:

• reading data of each pattern from a storage device storing write data which is to be written by using a charged particle beam and in which a plurality of patterns with different writing precision is defined, and cutting out a partial pattern, among a pattern, in the plurality of patterns, whose writing precision is on a low-precision side, positioned within a range of influence of a proximity effect from a region edge of a pattern, in the plurality of patterns, whose writing precision is on a high-precision side;
• performing merge processing of a cut-out partial pattern on the low-precision side and the pattern on the high-precision side;
• and
• outputting data of a pattern obtained by performing the merge processing and data of a remaining partial pattern on the low-precision side remaining without being cut out.

A charged particle beam writing method, comprising:

• reading data of each pattern from a storage device storing write data which is to be written by using a charged particle beam and in which a plurality of patterns with different writing precision is defined, and cutting out a partial pattern, among a pattern, in the plurality of patterns, whose writing precision is on a low-precision side, positioned within a range of influence of a proximity effect from a region edge of a pattern, in the plurality of patterns, whose writing precision is on a high-precision side;
• performing merge processing of a cut-out partial pattern on the low-precision side and the pattern on the high-precision side;
• and
• writing a pattern obtained by the merge processing and a remaining partial pattern on the low-precision side remaining without being merged with the pattern on the high-precision side to a target object by using the charged particle beam under different writing conditions based on data of the pattern obtained by the merge processing and data of the remaining partial pattern.