Waveguide-type semiconductor optical modulator and method for manufacturing the same
AssigneeNEC Corporation
InventorTomoaki Kato
Life of this patent
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Abstract
Provided is a traveling-wave type semiconductor optical phase modulator capable of high speed and low voltage operation by improving an n-SI-i-n-type layered structure. A first exemplary aspect of the present invention is a waveguide-type semiconductor optical modulator including: a semiconductor substrate (101); a first n-type cladding layer (103) and a second n-type cladding layer (108) formed on the semiconductor substrate (101); an undoped optical waveguide core layer (104) and an electron trapping layer (107) formed between the first n-type cladding layer (103) and the second n-type cladding layer (108); and a hole supplying layer (106) formed between the undoped optical waveguide core layer (104) and the electron trapping layer (107).
Claims11
A waveguide-type semiconductor optical modulator comprising:
- a semiconductor substrate;
- first and second n-type cladding layers formed on the semiconductor substrate;
- an undoped optical waveguide core layer and an electron trapping layer formed between the first and the second n-type cladding layers;
- and
- a hole supplying layer formed between the undoped optical waveguide core layer and the electron trapping layer.
A manufacturing method for a waveguide-type semiconductor optical modulator comprising:
- forming first and second n-type cladding layers on a semiconductor substrate;
- forming an undoped optical waveguide core layer and an electron trapping layer between the first and second n-type cladding layers;
- and
- forming a hole supplying layer between the undoped optical waveguide core layer and the electron trapping layer.
Dependencies are inferred from the claim text.