Acoustic sensor
AssigneeOMRON Corporation
InventorsEiichi Omura, Naoshi Ozawa, Shuichi Wakabayashi
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Abstract
An acoustic sensing element has a substrate that includes a back chamber, a vibration electrode plate that is provided in a surface of the substrate while being opposite an upper surface opening of the back chamber, and a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate. The acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate. A lower surface of the back chamber is closed into a pouched shape by the substrate.
Claims5
An acoustic sensing element comprising:
- a substrate that includes a back chamber;
- a vibration electrode plate that is provided on an upper side of the substrate while being opposite an upper surface opening of the back chamber;
- and
- a fixed electrode plate that is provided opposite the vibration electrode plate, an acoustic hole being made in the fixed electrode plate,
- wherein the acoustic sensing element outputs an electric signal based on an electrostatic capacitance change generated between the vibration electrode plate and the fixed electrode plate by a displacement of the vibration electrode plate,
- wherein the substrate is formed by joining a sub-substrate to a lower surface of a main substrate having a through-hole that pierces the main substrate from a front surface to a rear surface, and
- wherein a lower surface of the through-hole is closed by the sub-substrate, thereby forming the back chamber by a space including the through-hole, a lower surface of the back chamber being closed into a pouched shape.
Dependencies are inferred from the claim text.