US 8,300,767 B1 · Wavelength-classifying type X-ray diffraction device

Abstract

A wavelength-classifying type X-ray diffraction device bombards a sample with characteristic X-rays generated from an X-ray generation source, and detects characteristic X-rays diffracted by the sample using an X-ray detector. The X-ray generation source is composed of several metals of different atomic number, respective metals generating several characteristic X-rays of different wavelengths. An X-ray detector is composed of several pixels for receiving X-rays and outputting pulse signals corresponding to X-ray wavelengths. Pixels are respectively furnished with classification circuits. The classification circuits classify and output pixel output signals based on each of characteristic X-ray wavelengths. X-ray intensity is detected on a per-wavelength basis in individual pixels 12. Measurement data based on different wavelength X-rays are acquired simultaneously in just one measurement. Data of diffracted X-rays of different wavelengths are acquired using the entire region of the receiving surface of a two-dimensional detector.

Claims7

Dependent claims

A wavelength-classifying type X-ray diffraction device for bombarding a sample with characteristic X-rays generated by X-ray generating means, and detecting using X-ray detecting means the characteristic X-rays that have been diffracted by said sample, wherein:

said X-ray generating means is made of a plurality of metals having different atomic numbers, and generates from said respective metals a plurality of characteristic X-rays of mutually different wavelengths;
said X-ray detecting means is a pulse counting type pixel array detector, which is made of a plurality of pixels that receive characteristic X-rays of a plurality of wavelengths diffracted by said sample and that output signals corresponding to the wavelengths of said respective characteristic X-rays;
and
said pixels are respectively furnished with classifying means, said pixels outputting signals in different states for every wavelength of X-rays, said classifying means being adapted to classify output signals of said pixels into each of the wavelengths of the characteristic X-rays, and output the signals.

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Dependencies are inferred from the claim text.

Wavelength-classifying type X-ray diffraction device

Life of this patent

Wavelength-classifying type X-ray diffraction device

Life of this patent

Abstract

Claims7