Concept for detecting images with sub-wavelength resolution
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsWladimir Tschekalinskij, Stephan Junger, Norbert Weber
Life of this patent
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Abstract
A microscope with sub-wavelength resolution with a light source for monochromatic light with a predetermined wavelength, an object carrier for an object to be examined, and an image sensor with an optical structure with a first side and a second side opposite to the first side, the optical structure having a negative refractive index, and a pixel array extending along the second side of the optical structure at a predetermined distance, wherein the first side of the optical structure of the image sensor is arranged at a near-field distance smaller than the wavelength of the monochromatic light to the object carrier.
Claims19
A microscope with sub-wavelength resolution comprising:
- a light source for monochromatic light with a predetermined wavelength;
- an object carrier for an object to be examined;
- and
- an image sensor comprising
- an optical structure with a first side and a second side opposite to the first side, the optical structure comprising a negative refractive index;
- and
- a pixel array extending along the second side of the optical structure at a predetermined distance,
- wherein the first side of the optical structure of the image sensor is arranged at a near-field distance smaller than the wavelength of the monochromatic light to the object carrier.
A method of forming an image of an object, comprising:
- illuminating the object, with a first side of an optical structure with a negative refractive index arranged at least at a near-field distance to the object, so that an evanescent field on the first side, which is modulated by the object, is transmitted to a second side of the optical structure opposite to the first side;
- and
- detecting the evanescent field on the second side by a pixel array.
An optical apparatus for improving resolution of diffraction-limited optics, comprising:
- diffraction-limited optics;
- an optical structure with a negative refractive index, wherein a first side of the optical structure is arranged in an image plane of the diffraction-limited optics, and wherein the optical structure comprises neighboring metal layers with openings, wherein the openings comprise an opening expansion, and wherein a lateral offset of the openings of neighboring metal layers is smaller than the opening expansion, to achieve solid-angle selectivity of the optical structure;
- and
- a pixel array extending at a predetermined distance along a second side of the optical structure opposite the first side.
Dependencies are inferred from the claim text.