Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process
AssigneeDai Nippon Printing Co., Ltd.
InventorShinji Maekawa
Life of this patent
Estimating the term…
Abstract
A piezoelectric mirror device (11) comprises a frame portion (12) having a centrally located opening (13), a mirror portion (14) positioned at the opening (13), a pair of mirror support portions (15) adapted to support the mirror portion (14) rotatably relative the frame portion (12) and a pair of drive portions (16) that is a multilayer structure of lower electrodes (17), piezoelectric element (18) and an upper electrode (19). The mirror support portions (15) are formed of a material having a Young's modulus of up to 160 GPa, and the frame portion (12) includes a cutout (13a) at a part of a site wherein there are the drive portions (16) positioned. The cutout (13a) is in contact with the opening (13).
Claims9
A piezoelectric mirror device, comprising:
- a frame portion having a centrally located opening;
- a pair of drive portions that each have a multilayer structure of a lower electrode, a piezoelectric element and an upper electrode and are located at said frame portion;
- a mirror portion positioned at said opening;
- and
- a pair of mirror support portions adapted to support said mirror portion rotatably relative to said frame portion depending on operation of said drive portions, said drive portions being configured to rotate the mirror portion via the mirror support portions, and a center axis of the mirror support portions coincides with a location of the drive portions,
- wherein said mirror portion, said mirror support portions, and said lower electrode are formed integrally such that they are formed continuously of an electrically conductive material having a Young's modulus of up to 160 GPa, and said frame portion includes a cutout or thinner portion at a part of a site where there are said drive portions positioned, wherein said cutout or thinner portion is in contact with said opening.
A piezoelectric mirror device, comprising:
- a frame portion having a centrally located opening;
- a pair of drive portions that each have a multilayer structure of a lower electrode, a piezoelectric element and an upper electrode and are located at said frame portion;
- a mirror portion positioned at said opening;
- and
- a pair of mirror support portions adapted to support said mirror portion rotatably relative to said frame portion depending on operation of said drive portions,
- wherein said mirror support portions are formed of a material having a Young's modulus of up to 160 GPa, and said frame portion includes a cutout or thinner portion at a part of a site where there are said drive portions positioned, wherein said cutout or thinner portion is in contact with said opening,
- the piezoelectric mirror device further comprising:
- an inner frame portion defined by said frame portion, X-axis mirror support portions defined by said mirror support portions and X-axis drive portions defined by said drive portions, and further comprising an outer frame portion positioned in such a way as to surround said inner frame portion via the opening, a pair of Y-axis drive portions that are a multilayer structure of the lower electrode, the piezoelectric element and the upper electrode and located at said outer frame portion, and a pair of Y-axis mirror support portions adapted to support said inner frame portion rotatably relative to said outer frame portion depending on operation of said Y-axis drive portions, wherein said Y-axis mirror support portions are formed of a material having a Young's modulus of up to 160 GPa, and said outer frame portion includes a cutout or thinner portion at a part of a site where there are the Y-axis drive portions positioned, wherein said cutout or thinner portion is in contact with said opening, said X-axis is orthogonal to said Y-axis, and said mirror portion is biaxially rotatable and displaceable.
Dependencies are inferred from the claim text.