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US 8,300,221 B2Granted
Minute measuring instrument for high speed and large area and method thereof
AssigneeKorea Research Institute of Standards and Science
InventorsYong Jai Cho, Won Chegal, Hyun Mo Cho
Life of this patent
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Abstract
The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof.
Claims9
A minute measuring instrument for high speed and large area, comprising:
- a focused-beam ellipsometric part which is positioned above a specimen, includes a Z-translator and an ellipsometer, and measures optical properties of the specimen at higher speed by focusing polarized light outputted from the ellipsometer onto the specimen and detecting light reflected from the specimen, thereby detecting a singular optical point on a surface of the specimen, wherein the ellipsometer is moved upward or downward by using the Z-translator to focus the polarized light;
- and
- a minute measuring part which is positioned above the specimen, includes a Scanning Probe Microscope having a Z-scanner, a probe, an XY-scanner, and an XY-translator, and measures a position in a vicinity of the singular optical point at an atom level, wherein the probe is spaced apart from the focused-beam ellipsometric part by a predetermined distance in a horizontal direction and the specimen is moved in the horizontal direction by the XY-translator when the singular optical point is detected.
Dependencies are inferred from the claim text.