System and method for safeguarding wafers and photomasks

A system for safeguarding an article comprising:

• a container for storing a photomask;
• a flashing unit for flashing light with a pre-determined light pattern;
• an anti-theft unit capable of performing an anti-theft function, the anti-theft unit being attached to the container;
• and
• a trigger unit electrically connected to the anti-theft unit for triggering the anti-theft function of the anti-theft unit, in response to detecting the pre-determined light pattern of the flashing unit, wherein the container is a Reticle Standard Mechanical InterFace Pod (RSP), the anti-theft unit is a discharging device electrically connected to the photomask stored in the container, and the anti-theft function is discharging a current on the photomask by the discharging device so as to destroy a metal pattern on the photomask.

A method for safeguarding an article comprising:

• providing a container having an anti-theft unit capable of performing an anti-theft function;
• storing the article in the container, wherein the article is a wafer or a photomask;
• providing a flashing light with a pre-determined light pattern;
• detecting the pre-determined light pattern;
• and
• performing the anti-theft function by the anti-theft unit, in response to detecting the pre-determined light pattern, wherein the anti-theft unit comprises a strobe light, a sound alarm, an airbag, or a discharging device and the step of performing the anti-theft function comprises flashing the strobe light, sounding the sound alarm, inflating the airbag so as to break the wafer, or discharging a current on the photomask with the discharging device so as to destroy a metal pattern on the photomask.

A method for safeguarding an article comprising:

• providing a container having a first anti-theft unit capable of performing a first anti-theft function and a second anti-theft unit capable of performing a second anti-theft function;
• storing the article in the container, wherein the article is a wafer or a photomask;
• providing a first flashing light with a first pre-determined light pattern;
• detecting the first pre-determined light pattern;
• performing the first anti-theft function by the first anti-theft unit, in response to detecting the first pre-determined light pattern;
• providing a second flashing light with a second pre-determined light pattern, wherein the second flashing light is provided when the first anti-theft function has lasted for a period ranging from about 2 minutes to about 5 minutes after the first anti-theft function is triggered;
• detecting the second pre-determined light pattern;
• and
• performing the second anti-theft function by the second anti-theft unit, in response to detecting the second pre-determined light pattern, wherein the step of performing the second anti-theft function comprises inflating an airbag so as to break the wafer or discharging a current on the photomask with a discharging device so as to destroy a metal pattern on the photomask.