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US 8,299,812 B2Granted
Probe card
AssigneeKabushiki Kaisha Nihon Micronics
InventorsMitsuru Nitta, Osamu Arai, Motoharu Kimura
Life of this patent
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Abstract
An embodiment of a probe card comprising: a probe base plate including a ceramic base plate and a plurality of conductive paths; and a plurality of contacts disposed on one face of the probe base plate and electrically connected to the conductive paths. The ceramic base plate may be provided with: a plurality of first layers having a heating element which generates heat by electric power and disposed at intervals in the thickness direction of the ceramic base plate; second layers each interposed between adjoining first layers; and a power supply path for supplying electric power for heating to the heating element.
Claims17
A probe card, comprising:
- a probe base plate having a ceramic base plate and a plurality of conductive paths;
- a plurality of contacts arranged on one face of the probe base plate and electrically connected to said conductive paths;
- wherein said ceramic base plate includes:
- a plurality of first layers each having a heating element which generates heat by electric power and arranged at intervals in the thickness direction of said ceramic base plate;
- a second layer stacked between adjoining first layers and having said conductive paths;
- and
- a power supply path for supplying heating power to said heating element and
- wherein at least one of the first layers defines a through-hole which allows at least one conductive path to pass through the at least one first layers without contacting the heating element in the at least one first layers.
5 more elements
A probe card, comprising:
- a probe-base having a base plate and a plurality of conductive paths;
- a plurality of contacts arranged on one face of the probe-base and electrically connected to said conductive paths;
- wherein said base plate includes:
- a plurality of first layers each having a respective electric heating element, the first layers stacked at intervals in the thickness direction of said base plate;
- a second layer between adjacent ones of the first layers and having said conductive paths, the second layer and first layers forming a stack;
- and
- a power supply path for supplying heating power to said respective heating element;
- and
- wherein at least one of the first layers defines a through-hole which allows at least one conductive path to pass through the at least one first layers without contacting the heating element in the at least one first layers.
6 more elements
A probe card, comprising:
- a probe-base having a base plate and a plurality of conductive paths;
- a plurality of contacts arranged on one face of the probe-base and electrically connected to said conductive paths;
- wherein said base plate includes:
- a plurality of first layers each having a respective electric heating element, the first layers stacked at intervals in the thickness direction of said base plate;
- a second layer between adjacent ones of the first layers and having said conductive paths, the second layer and first layers forming a stack;
- and
- a power supply path for supplying heating power to said respective heating element;
- and
- wherein the second layer is interposed between adjoining first layers such that a substantially planar second-layer-top and substantially planar second-layer- bottom are substantially contacted by respective first layers such that substantially no space remains between the respective first and second layers.
6 more elements
A probe card, comprising:
- a probe base plate having a ceramic base plate and a plurality of conductive paths;
- a plurality of contacts arranged on one face of the probe base plate and electrically connected to said conductive paths;
- wherein said ceramic base plate includes:
- a plurality of first layers each having a heating element which generates heat by electric power and arranged at intervals in the thickness direction of said ceramic base plate;
- a second layer stacked between adjoining first layers and having said conductive paths;
- and
- a power supply path for supplying heating power to said heating element;
- and
- wherein the second layer is interposed between adjoining first layers such that a substantially planar second-layer-top and substantially planar second-layer-bottom are substantially contacted by respective first layers such that substantially no space remains between the respective first and second layers.
6 more elements
Dependencies are inferred from the claim text.