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US 8,299,809 B2Granted
In-line characterization of a device under test
AssigneeInternational Business Machines Corporation
InventorsTso-Hui Ting, Ping-Chuan Wang, Mohammed I. Younus
Life of this patent
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Abstract
An apparatus is provided and includes a thermally isolated device under test to which first and second voltages are sequentially applied, a local heating element to impart first and second temperatures to the device under test substantially simultaneously while the first and second voltages are sequentially applied, respectively and a temperature-sensing unit to measure the temperature of the device under test.
Claims14
An apparatus, comprising:
- a thermally isolated device under test to which first and second voltages are sequentially applied;
- a local heating element to impart first and second temperatures to the device under test substantially simultaneously while the first and second voltages are sequentially applied, respectively;
- and
- a temperature-sensing unit to measure the temperature of the device under test, and
- further comprising a thermal isolation trench surrounding and providing thermal isolation for the device under test;
- and
- a reference device disposed at an exterior of the thermal isolation trench, wherein the device under test and the reference device are connected in parallel with a differential amplifier.
4 more elements
An apparatus, comprising:
- a thermally isolated device under test to which first and second voltages are sequentially applied;
- a local heating element to impart first and second temperatures to the device under test independently of the first and second voltages being sequentially applied;
- and
- a sensor to measure a characteristic of the device under test, and further comprising an isolation trench surrounding and isolating the device under test;
- and
- a reference device disposed at an exterior of the isolation trench, wherein the device under test and the reference device are connected in parallel with a differential amplifier.
3 more elements
A method of conducting an in-line test of a device under test, the method comprising:
- thermally isolating the device under test;
- with the device under test thermally isolated, applying first and second voltages to the device under test;
- and
- during the applying of the voltages, imparting first and second temperatures to the device under test independently of the applying of the voltages, and
- further comprising measuring a characteristic of the device under test and a characteristic of a reference device;
- comparing results of the measuring of the device under test and the measuring of the reference device;
- and
- amplifying a difference between the results.
5 more elements
Dependencies are inferred from the claim text.