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US 8,299,685 B2Granted
High power ultrasonic transducer
AssigneeSamsung Electronics Co., Ltd.
InventorsKyung-il Cho, Jong-keun Song, Dong-wook Kim
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Abstract
A high power ultrasonic transducer includes a first ultrasonic transducer cell and at least one second ultrasonic transducer cell disposed on the first ultrasonic transducer cell. The at least one second ultrasonic transducer cell oscillates together with the first ultrasonic transducer cell.
Claims24
An ultrasonic transducer comprising:
- a first ultrasonic transducer cell;
- and
- at least one second ultrasonic transducer cell disposed on the first ultrasonic transducer cell,
- wherein the at least one second ultrasonic transducer cell oscillates together with the first ultrasonic transducer cell, and
- wherein the first ultrasonic transducer cell comprises:
- a substrate;
- a first thin film disposed opposite the substrate;
- a first support portion disposed between the substrate and the first thin film;
- a first cavity formed between the substrate and the first thin film;
- and
- electrodes for applying voltage to the first ultrasonic transducer cell.
8 more elements
An ultrasonic transducer comprising:
- a substrate;
- a first thin film disposed opposite the substrate;
- a plurality of first support portions disposed between the substrate and the first thin film;
- a plurality of first cavities formed between the substrate and the first thin film;
- a second thin film disposed opposite the first thin film;
- a plurality of second support portions disposed between the first thin film and the second thin film;
- and
- a plurality of second cavities formed between the first thin film and the second thin film,
- wherein ultrasonic waves are transmitted when an alternating current voltage is applied in a state where direct current voltages are applied to electrodes at the plurality of first cavities and the plurality of second cavities.
6 more elements
Dependencies are inferred from the claim text.