Laser annealing method and device

A laser irradiation apparatus comprising:

• a first laser oscillator for outputting a first laser beam;
• a second laser oscillator for outputting a second laser beam;
• a pulse controller for controlling the first laser oscillator and the second laser oscillator so as to make laser pulse output timings of the first laser oscillator and the second laser oscillator different from each other;
• a first polarization means for transforming the first laser beam to first linearly polarized laser beam;
• a second polarization means for transforming the second laser beam to second linearly polarized laser beam;
• a beam combining means for combining the first linearly polarized laser beam and the second linearly polarized laser beam;
• and
• a rectangular beam generating means for turning a combined laser beam form the beam combining means to a rectangular polarized laser beam whose cross section is a rectangle,
• wherein the first polarization means is configured to polarize the first laser beam in a long-side direction of the rectangle, and the second polarization means is configured to polarize the second laser beam in a short-side direction of the rectangle.

A laser irradiation apparatus comprising:

• a first laser oscillator for outputting a first laser beam;
• a second laser oscillator for outputting second laser beam;
• a beam combining means for combining the first laser beam and the second laser beam;
• a rectangular beam generating means for turning a combined laser beam from the beam combining means to a rectangular laser beam whose cross section is a rectangle;
• and
• a means for irradiating a surface with the rectangular laser beam,
• wherein the first laser beam and the second laser beam are linearly polarized, and
• wherein a polarization direction of the first laser beam and a polarization direction of the second laser beam are perpendicular to each other at the surface.

A laser irradiation apparatus comprising:

• a laser oscillator for outputting a linearly polarized laser beam;
• an unpolarization means for turning the linearly polarized laser beam to an unpolarized laser beam;
• and
• a rectangular beam generating means for turning the unpolarized laser beam to a rectangular laser beam whose cross section is a rectangle;
• and
• a means for irradiating a surface with the rectangular laser beam.

A laser irradiation apparatus comprising:

• a laser oscillator;
• and
• a polarizer arranged to polarize a laser beam output from the laser oscillator,
• wherein an energy density of the polarized laser beam on an irradiation surface is greater than 500 mJ/cm2.