Layer structure for electrical contacting of semiconductor components
AssigneeRobert Bosch GmbH
InventorsJochen Reinmuth, Peter Schmollngruber, Hans Artmann
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AssigneeRobert Bosch GmbH
InventorsJochen Reinmuth, Peter Schmollngruber, Hans Artmann
Estimating the term…
A layer structure for the electrical contacting of a semiconductor component having integrated circuit elements and integrated connecting lines for the circuit elements, which is suitable in particular for use in a chemically aggressive environment and at high temperatures, i.e., in so-called “harsh environments,” and is simple to implement. This layer structure includes at least one noble metal layer, in which at least one bonding island is formed, the noble metal layer being electrically insulated from the substrate of the semiconductor component by at least one dielectric layer, and having at least one ohmic contact between the noble metal layer and an integrated connecting line. The noble metal layer is applied directly on the ohmic contact layer.
A layer structure for electrical contacting of semiconductor components having integrated circuit elements and integrated connecting lines for the circuit elements, the layer structure comprising:
Dependencies are inferred from the claim text.