Transistor and method thereof

An electronic device comprising:

• a first well region of a first conductivity-types
• a second well region of a second conductivity-type abutting the first well region at a first interface, from a top view the first interface generally extends in a first direction, the first conductivity-type and the second conductivity type being opposite conductivity types;
• an insulator region extending into the first well region, wherein the insulator region and the first well region abut and define a second interface, and, from a top view, the insulator region includes a first feature extending toward the first interface, and the insulator region defines a first space bounded by the first feature, wherein a dimension from a portion of the first feature closest to the first interface is at least zero, and a ratio of the width of the first space to a width of the first feature is greater than approximately 0.25;
• and
• a transistor gate structure overlying the first interface.

A process of forming an electronic device comprising:

• providing a substrate comprising a first well region of a first conductivity-type abutting a second well region of a second conductivity-type at a first interface, from a top view the first interface generally extends in a first direction, the first conductivity-type and the second conductivity type being opposite conductivity types;
• forming an insulator region extending into the first well region, wherein the insulator region and the first well region abut and define a second interface region, and, from a top view, the insulator region includes a first feature extending toward the first interface region, and the insulator region defines a first space bounded by the first feature, wherein a dimension from a portion of the first feature closest to the first interface is at least zero, and wherein a portion of the insulator region closest to the first interface is less than about 0.2 um from the first interface;
• and
• forming a transistor gate structure overlying the first interface.