Back to results
US 8,299,521 B2Granted
Nonvolatile memory device and method of fabricating the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJung-hyun Lee, Young-eal Kim, Chang-soo Lee, Dong-joon Ma
Life of this patent
Estimating the term…
Abstract
Provided are a nonvolatile memory device having a vertical folding structure and a method of manufacturing the nonvolatile memory device. A semiconductor structure includes first and second portions that are substantially vertical. A plurality of memory cells are arranged along the first and second portions of the semiconductor structure and are serially connected.
Claims18
A nonvolatile memory device, comprising:
- a substrate;
- a semiconductor structure on the substrate, the semiconductor structure including first and second portions that are substantially vertical and face each other, and a bottom portion that connects the first and second portions;
- and
- a plurality of memory cells serially connected and arranged along the first and second portions of the semiconductor structure, each memory cell defined by,
- an active region defined by a part of one of the first and second portions of the semiconductor structure,
- a control gate electrode, and
- one of a plurality of storage media,
- the one of the plurality of storage media between the control gate electrode and the part of one of the first and second portions, and
- the one of the plurality of storage media covering at least one of an upper and a lower surface of the control gate electrode.
6 more elements
A method of manufacturing a nonvolatile memory device, the method comprising:
- forming a semiconductor structure on a substrate, the semiconductor structure including first and second portions that are substantially vertical and face each other, and bottom portion that connects the first and second portions;
- and
- forming a plurality of memory cells that are arranged along the first and second portions of the semiconductor structure and are serially connected, each memory cell defined by,
- an active region defined by a part of one of the first and second portions of the semiconductor structure,
- a control gate electrode, and
- one of a plurality of storage media,
- the one of the plurality of storage media between the control gate electrode and the part of one of the first and second portions, and
- the one of the plurality of storage media covering at least one of an upper and a lower surface of the control gate electrode.
5 more elements
A nonvolatile memory device, comprising:
- a substrate;
- a semiconductor structure on the substrate, the semiconductor structure including first and second portions that are substantially vertical and face each other,
- a bottom portion that connects the first and second portions, and
- a first peak portion extending horizontally from an upper end of the first portion;
- and
- a plurality of memory cells serially connected and arranged along the first and second portions of the semiconductor structure,
- each memory cell containing an active region defined by a part of one of the first and second portions of the semiconductor structure;
- a string selection transistor including a horizontal active region,
- the horizontal active region defined by a part of the first peak portion of the semiconductor structure.
6 more elements
Dependencies are inferred from the claim text.