Electron microscope and observation method
AssigneeFujitsu Limited
InventorTakeshi Soeda
Life of this patent
Estimating the term…
Abstract
An electron microscope includes an electron gun for generating an electron beam, an accelerator for accelerating the electron beam to apply the electron beam to a sample, a spectroscope for selecting electrons having a specific energy out of the electron beam transmitted through the sample and losing an energy by an interaction with the sample, and a detector for detecting the electrons of the specific energy selected by the spectroscope and giving a transmission signal or a diffraction signal at a depth of the sample corresponding to a lost energy quantity of the electrons.
Claims8
An electron microscope comprising:
- an electron gun configured to generate an electron beam;
- an accelerator configured to accelerate the electron beam and to apply the electron beam to a sample;
- a controller configured to control an acceleration energy of the electron beam to be applied to the sample so that a focal position of the electron beam agrees with a depth of a region to be measured of the sample;
- and
- a detector configured to detect selectively electrons losing a specific energy corresponding to the depth of the region to be measured of the sample out of the electron beam transmitted through the sample and losing energy due to an interaction with the sample to obtain a transmission image or a diffraction image of the electrons at the depth of the region to be measured of the sample, wherein
- the controller is configured to control the acceleration energy of the electron beam to be applied to the sample so that energy of the electrons losing the specific energy agrees with a rated acceleration energy.
An observation method of an electron microscope comprising:
- controlling an acceleration energy of an electron beam to be applied to a sample so that a focal position of the electron beam agrees with a depth of a region to be measured of the sample to apply the electron beam to the sample;
- detecting selectively electrons losing a specific energy corresponding to the depth of the region to be measured of the sample out of the electron beam transmitted through the sample and losing energy due to an interaction with the sample;
- and
- obtaining a transmission image or a diffraction image of the electrons at the depth of the region to be measured of the sample, wherein
- the acceleration energy of the electron beam to be applied to the sample is set so that energy of the electrons losing the specific energy agrees with a rated acceleration enemy of the electron microscope.
Dependencies are inferred from the claim text.