Back to results
US 8,299,370 B2Granted
Wiring board and method of manufacturing the same
AssigneeShinko Electric Industries Co., Ltd.
InventorsHideaki Sakaguchi, Akinori Shiraishi, Mitsutoshi Higashi
Life of this patent
Estimating the term…
Abstract
A wiring board includes a first substrate portion including a first feed-through conductor portion in a vertical direction, a second substrate portion provided on the first substrate portion and including a second feed-through conductor portion in a vertical direction of a corresponding part to the first feed-through conductor portion, and a feed-through electrode including the first feed-through conductor portion and the second feed-through conductor portion.
Claims2
A wiring board comprising:
- a first silicon substrate formed by a wafer and including a first feed-through conductor portion in a vertical direction formed in a first through hole;
- a second silicon substrate formed by a wafer, provided on the first silicon substrate and including a second feed-through conductor portion in the vertical direction formed in a second through hole, the second feed-through conductor portion being vertically aligned with the first feed-through conductor portion;
- a first insulating layer formed on upper and lower surfaces of the first silicon substrate and an internal surface of the first through hole;
- a second insulating layer formed on upper and lower surfaces of the second silicon substrate and an internal surface of the second through hole;
- the first silicon substrate and the second silicon substrate being stacked via a bonding resin layer formed on a surface area of the first silicon substrate excluding the first feed-through conductor portion;
- and
- a feed-through electrode comprising the first feed-through conductor portion and the second feed-through conductor portion being integrally formed,
- wherein the second feed-through conductor portion contacts the second insulating layer formed on the second silicon substrate and contacts the bonding resin layer.
5 more elements
Dependencies are inferred from the claim text.