Polycrystalline thin film, method for producing the same and oxide superconductor
AssigneesFujikura Ltd., The Juridical International Superconductivity Technology Center
InventorsYasuhiro Iijima, Satoru Hanyu
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Abstract
An object of the invention is to provide a polycrystalline thin film which includes an intermediate layer that is made thinner while keeping high crystal orientation so as to prevent warpage of a substrate resulting from internal stress of the film. A polycrystalline thin film according to the invention includes an intermediate layer formed by a first layer and a second layer laminated in this order and provided on a metal substrate. The first layer has a rock-salt crystal structure and the second layer has a fluorite crystal structure.
Claims15
A polycrystalline thin film includes an intermediate layer formed by a first layer and a second layer laminated in this order and the intermediate layer provided on a metal substrate:
- wherein,
- the first layer has a rock-salt crystal structure and the second layer has a fluorite crystal structure.
A method for producing a polycrystalline thin film which includes an intermediate layer formed by a first layer and a second layer laminated in this order and provided on a metal substrate, the first layer having a rock-salt crystal structure and the second layer having a fluorite crystal structure, wherein the first layer and the second layer are formed by an ion beam assist method.
An oxide superconductor includes at least an intermediate layer formed by a first layer and a second layer laminated together, a cap layer and an oxide superconductive layer laminated together in this order on a metal substrate:
- wherein,
- the first layer has a rock-salt crystal structure and the second layer has a fluorite crystal structure.
Dependencies are inferred from the claim text.