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US 8,299,341 B2Granted
Fabrication of vertically aligned metallic nanopillars
AssigneeCalifornia Institute of Technology
InventorsJulia R. Greer, Michael Burek
Life of this patent
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Abstract
Solid and hollow cylindrical nanopillars with nanoscale diameters are provided. Also provides is a method of making such nanopillars using electron beam lithography followed by the electroplating.
Claims14
A solid or hollow nano-crystalline pillar structure lacking Ga+ ion damage, made by a process comprising
- (a) coating a substrate with a conductive layer;
- (b) coating the conductive layer with a resist polymer;
- (c) using an electron beam lithography technique to pattern a template into the resist polymer;
- (d) electrodepositing a metal into the template;
- and
- (e) removing the resist;
- and (f) coating over the substrate having the conductive layer and the metal with a metal oxide, a metal nitride or other organo-metallic materials.
4 more elements
A method of making a nanopillar composition lacking Ga+ ion damage comprising:
- (a) coating a substrate with a conductive layer;
- (b) coating the conductive layer with a resist polymer;
- (c) using an electron beam lithography technique to pattern a template into the resist polymer;
- (d) electrodepositing a metal into the template;
- and
- (e) removing the resist;
- and (f) coating over the substrate having the conductive layer and the metal with a metal oxide, a metal nitride or other organo-metallic materials.
4 more elements
Dependencies are inferred from the claim text.