Method of forming organic thin film pattern and method of manufacturing organic light-emitting display device by using the method of forming organic thin film pattern
AssigneeSamsung Display Co., Ltd.
InventorsKang-Il Lee, Yong-Sup Choi, Chool-Lae Roh
Life of this patent
Estimating the term…
Abstract
A method of manufacturing an organic thin film pattern, the method including: forming a dummy organic thin film on a substrate; radiating light on the dummy organic thin film pattern the dummy organic thin film; forming a main organic thin film, having a sublimation temperature is higher than that of the dummy organic thin film, on the substrate and the patterned dummy organic thin film; and heating patterned the dummy organic thin film and the main organic thin film, to sublimate the dummy organic thin film and thereby pattern the main organic thin film.
Claims24
A method of manufacturing an organic thin film pattern, comprising:
- forming a dummy organic thin film on a substrate;
- radiating light on the dummy organic thin film, to pattern the dummy organic thin film;
- forming a main organic thin film on the patterned dummy organic thin film and exposed portions of the substrate;
- and
- heating the patterned dummy organic thin film and the main organic thin film, to sublimate the dummy organic thin film and pattern the main organic thin film,
- wherein the sublimation temperature of the main organic thin film is higher than the sublimation temperature of the dummy organic thin film.
A method of manufacturing an organic light-emitting display device comprising a substrate, a first electrode disposed on the substrate, and an opposing second electrode, the method comprising:
- forming a dummy layer on the substrate on which the first electrode is formed;
- radiating light on the dummy layer to pattern the dummy layer;
- forming an organic layer on the first electrode and on the patterned dummy layer;
- heating the patterned dummy layer and the organic layer at a temperature that is higher than the sublimation temperature of the dummy layer and lower than the sublimation temperature of the organic layer, to sublimate the dummy layer and pattern the organic layer;
- and
- forming the second electrode on the patterned organic layer.
Dependencies are inferred from the claim text.