Multiple phase RF power for electrode of plasma chamber
AssigneeApplied Materials, Inc.
InventorsBradley O. Stimson, John M. White
Life of this patent
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Abstract
RF power is coupled with different phase offsets to different RF connection points on an electrode of a plasma chamber. Preferably, the number of different RF connection points and corresponding phase offsets is at least four, and the positions of the RF connection points are distributed along two orthogonal dimensions of the electrode. Preferably, power to each respective RF connection point is supplied by a respective RF power supply, wherein each power supply synchronizes its phase to a common reference RF oscillator.
Claims12
A method of coupling RF power to a plasma chamber comprising the steps of:
- providing a plasma chamber comprising an electrode, wherein the electrode comprises first, second, third and fourth RF connection points;
- providing first, second, third and fourth RF power supplies;
- ;
- and
- respectively coupling a first, second, third and fourth RF power signal respectively outputted by the first, second, third and fourth RF power supply to the first, second, third and fourth RF connection points, respectively;
- wherein:
- each of the second, third and fourth RF power signals has the same frequency as the first RF power signal and a different non-zero phase offset relative to the first RF power signal;
- the RF connection points are positioned on a two-dimensional surface of the electrode;
- and
- the positions of the RF connection points are distributed along both dimensions of said surface.
A method of coupling RF power to a plasma chamber comprising the steps of:
- providing a plasma chamber comprising an electrode, wherein the electrode comprises first, second, third and fourth RF connection points;
- providing first, second, third and fourth RF power supplies;
- and
- respectively coupling a first, second, third and fourth RF power signal respectively outputted by the first, second, third and fourth RF power supply to the first, second, third and fourth RF connection points, respectively;
- wherein:
- each of the second, third and fourth RF power signals has the same frequency as the first RF power signal and a different non-zero phase offset relative to the first RF power signal;
- the RF connection points are positioned on a rectangular surface of the electrode;
- and
- the positions of the RF connection points are distributed along both the X and Y axes of said rectangular surface.
Dependencies are inferred from the claim text.